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PrefaceThis collaboration evolved from contributions by faculty members who participated in workshops on Nano-BioFluidic Micro Electro-Mechanical Systems (MEMS) at the Georgia Institute of Technology, Atlanta, Georgia, in November, 2005 and June, 2006. The objective of these workshops was to bring together researchers, engineers, faculty, and students to review the interdisciplinary topics related to miniaturization and to nanomaterials processing, with a particular emphasis on the development o...
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MEMS Reference Shelf Peter-J. Hesketh Editor BioNano-Fluidic MEMS BioNano-Fluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: Interconnection between the interdisciplinary nature of BioNano-Fluidics and MEMS BioNano-Fluidics and sen... [weiter lesen] |
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Contents
1 Nanotechnology: Retrospect and Prospect 1
James D. Meindl
2 Synthesis of Oxide Nanostructures 11
Chenguo Hu, Hong Liu and Zhong Lin Wang
3 Nanolithography 37
Raghunath Murali
4 Nano/Microfabrication Methods for Sensors and NEMS/MEMS 63
Peter J. Hesketh
5 Microand Nanomanufacturing via Molding 131
Harry D. Rowland and William P. King
6 Temperature Measurement of Microdevices using
Thermoreflectance and Raman Thermometry 153
Thomas Beechem and Samuel Graham
7 Stereolithography and Rapid Prototyping 175
David W. Rosen
8 Case Studies in Chemical Sensor Development 197
Gary W. Hunter, Jennifer C. Xu and Darby B. Makel
9 Engineered Nanopores 233
Amir G. Ahmadi and Sankar Nair
10 Engineering Biomaterial Interfaces Through Micro and Nano-Patterning 251
Joseph L. Charest and William P. King
11 Biosensors Micro and Nano Integration 279
Ravi Doraiswami
About the Cover 291
Index 293
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Index
AAFM, see Atomic force microscopy Alumina, 12, 63, 73, 75, 77, 78-82, 83, 85, 87, 88-...
Arrays of sensors, 184, 197, 198, 218-223, 226
Atomic force microscopy, 37, 38, 59, 68, 71, 103, 104, 105, 110, 129, 135, 154, 175, ...
Atomic layer deposition, 63, 64, 73-77, 86, 129
BBaTiO 3 , 11, 24, -27, 31
Beam scanning, 44, 57, 60
Biocompatible, 279, 284, 288
Biomolecule analysis BioMEMS devices, 233, 245, 279-289
Biosensors, 233, 252, 279-280, 288
Bismuth oxide, 119-121
Bonding, 177, 178, 192, 200, 242, 282, 285, 286, 287
Bottom-up manufacturing, 1, 4, 227
Bumps, 279, 280, 282, 287
CCarbon dioxide, 197, 213, 214, 219
Carbon nanomaterials, 5, 19, 104, 106, 107, 109, 110, 209, 213, 214, 219
Carbon nanotubes, 4, 5, 7, 135
Capillary flow, 131, 142, 146
Cell surface, 122
Chemical-assisted ion beam etching, 93, 253
Chemical sensors, 68, 175, 186, 197, 212, 213, 214, 218, 219, 221-222
Chemical vapor deposition, 63, 64, 73, 106, 129
Cobalt, 110, 114-117
Composite-hydroxide mediated, 21-23, 32, 34
Copper, 4, 7, 87, 94, 113, 114, 115, 117, 283
DDecomposition, adsorbed species, 162
Diamond, 78, 104, 106, 107, 184, 186
Dip pen, 59-60, 259
DNA sequencing, 233, 234, 237, 238, 240, 246
Dry etching, 238
EElectrochemical cell, 110-112, 206, 214-215, 217, 218, 219
Electron optics, 41, 42-43, 44, 48, 96
Electron projection lithography, 59
Electroplating, 63-64, 110-111, 115, 117-120, 129, 133, 188, 255, 282, 283, 286, 288
Epitaxy, atomic layer, 73, 129
Etching, 58, 60, 63, 64, 78, 84, 93, 95, 99-103, 113, 133, 184, 186, 213, 231, 238-24...
Exposure, x-ray lithographic microfabrication, 58-59
FFEA, see Finite element analysis
Ferromagnetic, 27, 28, 63, 114, 117
FIB, see Focused ion beam
Field effect transistors, 135, 151, 170
Film formation, 68-71
Finite element analysis, 170-171
Fire sensor, 218-222
Fluid model, 14-16, 137-142, 144, 146, 147
Focused ion beam, 58, 63, 64, 95-110
Focused ion beam etching, 93, 253
GGallium, 95, 96, 97, 98, 104, 170, 259
Gold, 66, 69, 70, 71, 93, 95, 104, 105, 106, 113, 114-116, 119, 120, 200, 247, 282, 2...
Growth, 12-14, 27-29, 30, 34, 64, 68-71, 73-74, 76, 77, 78, 81, 87, 88, 110, 112, 119...
HHigh-aspect ratio microstructures, 175
Hot embossing, 131, 132, 256, 263
Hydrocarbon, 197, 207-208, 219, 223-225
Hydrogen, 37, 47, 78, 81, 87, 92, 112, 117, 197-212, 219, 223-225, 231
Hydrothermal synthesis, 11, 14-19, 20, 21, 32-34
IImmunobiosensor, 71, 72
Indium, 78, 113
Injection molding, 132, 252, 255
Inspection systems, 59, 121
Intermetalics, 279, 282
Ion beam CVD, 110
Ion beam film deposition, 95
Ion beam lithography, 38, 58, 64, 253
Ion channel, 113, 233, 234
JJFET, 103, 130
KKnudsen number, 66
LLab-on-a-chip, 134, 288
Laser-based microand nano-interconnects, 39, 142-143
Laser direct write, 60
Leak sensor, 225
Lithographic method, 37, 59
Lithographic processes, 64,
see also X-ray
lithographic microfabrication
MMachining, 101, 103
- See also High-aspect ratio microstructures Masks, 37, 38, 41, 59, 132, 135, 188, 18...
Membrane, 59, 63, 92-95, 99, 112, 113-115, 117, 120, 188, 233, 235, 238-240, 244, 264
MEMS, 55, 63, 74, 89-92, 103, 130, 131, 134, 151, 153, 171, 172, 175, 188, 197, 198, ...
Metallic wire, 118
Metal oxide, 15, 19, 20, 63, 73, 75, 85-87, 119-121, 218
Microelectronics, 153, 171, 172, 178, 194, 279
Microfabrication, x-ray lithography, 38, 58-59
Microfluidic devices, 135, 175
Micro-fluidics, 175, 176, 177, 178, 183, 189
Microfluidic systems, 131, 134, 135, 147, 175, 183, 194, 233, 247, 284
Micromanufacturing, 1-7
Micromolding, 131, 132, 134, 135, 137, 138, 140, 141, 146
Micromolding in capillaries, 137, 141-142, 146, 151, 236
Molding, 176, 192, 194, 252, 255-256
Molecular simulation, 233
NNanobelts, 11, 13, 16, 17, 28, 29, 30, 32, 33
Nanoelectronics, 134, 279
Nanofabrication, 63, 64, 103, 121, 132, 233
Nanoimprint lithography, 131, 132, 133, 151
Nanomanufacturing, 63, 121, 122, 131-147, 151, 247
Nanomolding, 131-147
Nanopore, 117, 233-247
Nanorods, 11, 18, 19, 20, 27, 31, 113, 212
Nanosprings, 108
Nanowires, 11-17, 22, 23, 31, 34, 54, 63, 74, 113, 115, 116, 117, 119-121
Nickel, 87, 114-117, 253, 255, 288
Nucleation, 13, 14, 64, 68-71, 85, 86, 88, 89, 111, 117, 119
OOptical lithography, 37-38, 53, 54, 58, 59
Optimal wavelength, 180
PPackaging, 154, 175, 183, 186, 189, 197, 222, 223, 231, 280, 281, 284-286, 288-289
Palladium, 117, 199, 200, 203, 209, 211
PDMS, see Polydimethylsiloxane, 133, 176, 192-194
Platinum, 22, 25, 66, 67, 70, 71, 72, 78, 87, 101, 102, 103, 104, 110, 117, 118, 135,...
PMMA, see Polymethylmethacrylate Polyimide, 253, 254, 256
Polymer deformation, 131, 137, 138, 139
Process design, 131, 137, 146
Proximity effect, 37, 40, 47-51, 52, 55, 59
QQuartz, 12, 14, 16, 20, 67, 78, 79, 87, 130, 133, 253, 254
RRaman thermometry, 153, 171
Rapid prototyping, 175-194
Reaction injection molding, 132
Reactive ion etching, 101, 129, 238, 239, 253, 254
Refractory bonding systems, 67-68
Resist, 37-39, 44-49, 51, 53-56, 58-59, 98, 99, 148, 253, 254, 259, 283
Resolution, 11, 25, 37-41, 44-48, 51, 53-60, 64, 95, 101, 104, 109, 131, 133, 135, -1...
Resonators, 90, 135
RIE, see Reactive ion etching
SSAMs, see Self-assembled molecules Scanning Electrochemical Microscopy, 130
SECM, see Scanning Electrochemical Microscopy Self-assembled molecules, 4, 5, 59
Semiconductor manufacturing, 1-3
Sensor array, 197, 218-225
- packages, 175, 183, 184-185
Silicate, 257
Silicon carbide, 90, 197, 207
Sputtering, 64, 67, 68, 100, 118, 214, 239, 282, 288
Steppers, 38
Stereolithography, 175-194, 196
TTemperature measurement, 153, 154, 155-157, 159-172
Template, 16, 18, 63, 92, 93, 110, 112-115, 118, 121, 133
Thermal management, 153, 171, 172
Thermoreflectance, 153-172
Tin, 113, 218
Titania, 18, 73, 75, 82, 93
Top down manufacturing, 4, 252
Trenches, 39, 53, 99, 100, 144
Tungsten, 65, 88, 89, 93, 95, 97, 103, 104, 107, 108, 109
UUltrashort picosecond pulse, 244
Ultrathin film, 63, 68-71
VVapor-liquid-solid, 11
Vapor pressure, 12, 65-67, 97, 129
Vapor-solid, 11, 13
Viscous flow, 131, 137, 138, 139, 141, 142, 143, 146
XX-ray diffraction, 11, 25, 29, 117, 130
X-ray lithography, 38, 58-59
X-ray masks, 37-38, 41, 59
YYoung's modulus, 104, 107, 108
ZZinc, 78, 113
Zirconia, 82
ZnO, 11, 12, 13, 14, 15, 78, 87
ZnS, 31, 75, 76, 78
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