DeutschesFachbuch.de : Microsystem Engineering of Lab-on-a-Chip Devices

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Contents
Preface XI
1 Introduction 1
PIETER TELLEMAN
1.1 Learning from the Experiences of Microelectronics 1
1.2 The Advantages of Miniaturizing Systems for Chemical Analysis 2
1.3 From Concept to μ TAS 4
1.4 References 7
2 Clean Rooms 9
DARIA PETERSEN and PIETER TELLEMAN
3 Microfluidics - Theoretical Aspects 13
JÖRG P. KUTTER and HENNING KLANK
3.1 Fluids and Flows 14
3.2 Transport Processes 21
3.2.1 Types of Transport 21
3.2.1.1 Convection 21
3.2.1.2 Migration 22
3.2.1.3 Diffusion 23
3.2.1.4 Dispersion 26
3.3 System Design 26
3.3.1 Laminar Flow and Diffusion in Action 27
3.4 An Application: Biological Fluids 35
3.5 References 37
4 Microfluidics - Components 39
JÖRG P. KUTTER, KLAUS BO MOGENSEN, HENNING KLANK, and OLIVER GESCHKE
4.1 Valves and Pumps 39
4.1.1 Moving Liquids by Electroosmosis 46
4.1.2 Mixers 50
4.2 Injecting, Dosing, and Metering 54
4.3 Temperature Measurement in Microfluidic Systems 58
4.3.1 Microreactors 59
4.3.2 Temperature Sensors for Microsystems 60
4.3.3 Resistance Temperature Detectors 60
4.3.3.1 Metals 60
4.3.3.2 Nonmetals 61
4.3.4 Thermocouples 63
4.3.5 Semiconductor Junction Sensors 63
4.3.6 Temperature Sensors Built on Other Principles 64
4.3.7 Conclusion 65
4.4 Optical Sensors 65
4.4.1 Instrumentation 66
4.4.2 Absorption Detection 67
4.4.3 Optical Waveguidance 70
4.4.4 Fluorescence Detection 74
4.5 Electrochemical Sensors 77
4.6 References 80
5 Simulations in Microfluidics 83
GORAN GORANOVIC and HENRIK BRUUS
5.1 Physical Aspects and Design 84
5.2 Choosing Software and Hardware 87
5.2.1 CFD-ACE+Version 6.6 87
5.2.2 Coventor-Ware™ Version 2001.3 88
5.2.3 Hardware 89
5.2.4 The Core Elements of Typical CFD Software 89
5.2.5 Pre-processors 89
5.2.6 Solvers 93
5.2.7 Post-processors 93
5.3 Important Numerical Settings 94
5.3.1 Boundary Conditions 94
5.3.2 Solver Settings 95
5.4 Errors and Uncertainties 99
5.5 Interpretation and Evaluation of Simulations 99
5.6 Example Simulations 100
5.6.1 Fully-developed Flow in a Circular Capillary 200
5.6.2 Movement of a Chemical Plug by Electroosmotic Flow in a Detection Cell 104
5.6.3 Conclusions 117
5.7 References 119
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Subject Index
Aabsorbance value 67
absorption detection 67-69
active valves 40
actuators 41, 42
adaptive valves 41
adhesion, definition 136
adhesion bonding 172
AFM see atomic force microscope
aligner 130
amino acids, MEKC separation 259
ammonium detection, flow injection
analysis 251-252
amperometric determination, glucose 248
amperometry 77
analytical chemistry, biosensors 247-249
- electrokinetic DNA enrichment 272
- electrostacking 272-275
- flow injection analysis 249-252
- free-zone electrophoresis 254-256
- gel electrophoresis 256-257
- hydrodynamic chromatography 268-269
- in-situ-polymerized stationary phases 264-265
- micellar electrokinetic chromatography 257-260
- on microsystems 244-275
- open-channel electrochromatography 260-261
- packed-bed chromatography 261
- sensors 244-247
- separation techniques 252-270
- shear-driven chromatography 269-270
- solid-phase extraction 270-272
- stationary-phase support structures 261264
- synchronous cyclic capillary electrophoresis 265-266
- two-dimensional separations 266-268
- various analytical techniques 270-275
annealing, silicon processing 164
anodic bonding 164
aspect ratio 156
atomic force microscope (AFM) 233-235
Bband broadening, flow injection analysis 26
Bernoulli equation 19
biological fluids 35-36
biosensors 247-249
bistable valves 41
blasting, powder 170
bonding 209
- glass see glass bonding
- polymer microstructures 185
borofloat glass 168
borosilicate 144
boundary conditions 18-19
bulk fracture 136
CCAD software 131
Calma stream (GDSII) 131
calomel electrodes 77-78
Caltech intermediate format (CIF) 131
capillary electrophoresis
- cyclic 265-266
- separation 254
casting 179-181
- PDMS 180-181
CFC compounds 159
CFD see computational fluid dynamics
CFD-ACE+version 6.6 87
CFD Software 89
channel geometry 19-20, 256
channel layout
- flow injection analysis 250
- synchronous cyclic capillary electrophoresis 266
check valves 40
chemical analysis
- advantages of miniaturization 2-3
- see also analytical chemistry
chemical etching, wet 169
chemical plugs, simulations 104-116
chemical vapor deposition (CVD) 138-139
chromatography
- hydrodynamic 268-269
- micellar electrokinetic 257-260
- open-channel 260-261
- packed-bed 261
- shear-driven 269-270
CIF see Caltech intermediate format
circular capillaries, simulations 100-103
clean rooms 9-11
cleanroom processing, silicon 121-166
computational fluid dynamics (CFD) 87-93
computer-aided design (CAD) software 131
confocal laser scanning microscope 235
confocal microscope 235-238
conformity, definition 136
connections, optical 215-217
contact printing 129
continuity equation 19
- and Ficks law 24
convection, definition 21
Coulomb force, definition 22
Courant-Friedrich-Levy (CFL) number 96
Coventor-Ware™ version 2001.3 88
creeping flow, definition 17
critical angle 71
CVD see chemical vapor deposition
cyclic capillary electrophoresis, synchronous 265-266
D 2 D separation, chip layout 267 Debye length 48
deep reactive ion etching (DRIE) 157-158
deformation, definition 207
density, as important parameter 14-15
deposition 136-147
- lift-off 146
- materials 142-145
- methods 138-141
- silicides 147
design, packaging 198-199
detection cells, simulations 104-116
diamond structure 122
diffusion
- coefficient 29, 30, 64, 86, 92, 108, 109, 113, 163
- definition 21, 23-25
- silicon processing 163
- temperature dependence 24-25
direct bonding 185
directed transport, definition 21
dispersion, definition 26
DNA, electrokinetic enrichment 272
DNA fragments, separation 257
double-T injection 57
DRIE see deep reactive ion etching
drive-in process 163
dry oxidation 161
EEinstein-Smoluchowski relation 23
electrical interconnections 208-210
electrochemical sensors 77-79
- oxygen 244
electrochromatography, open-channel 260261
electroendosmotic flow 47
electrokinetic chromatography, micellar 257-260
electrokinetic DNA enrichment 272
electrokinetic valves 55
electron-beam deposition 140
electron emitter, SEM 229
electron microscopes
environmental 232-233
- scanning 229-233
electroosmosis 46-49
electroosmotic flow 47
- definition 21
- simulations 104-116
electrophoresis
- free-zone 254-256
- gel 256-257
- synchronous cyclic capillary 265-266
electrophoretic separations 173
- capillary 254
electroplating 140-141
electropolymerization 249
electrostacking 272-275
- junction structure 273
- side channel 274
embossing, hot 176-179
end butt coupling 215
entropy-driven transport, definition 21
environmental scanning electron microscope (ESEM) 232-233
enzymes, biosensors 247
ESEM see environmental scanning electron microscope
etch gases 159
etching 147-160
- deep reactive ion 157-158
- dry 153-160
- HF 148
- isotropic 169
- laser-assisted 160
- plasma 154-160
- reactive ion 169
- transport-limited 152
- wet 147-152, 169
evanescent field region 73
evanescent-wave sensors 69
external interconnections, modeling 204208
FFEM see finite-element method
Ficks law 23-24
finite-element method (FEM) 93
finite-volume method (FVM) 93
flat, wafer processing 123
flip chip 209
flow channel see channel ...
flow focusing 30
flow injection analysis 249-252
- band broadening 26
fluidic gasket, electrical interconnections 210 fluidic interconnections 201-204
- modeling 204 fluidic resistance 19
Fluidic via 132
fluids and flows, microfluidics 14-20
fluorescence detection 74-76
forced convection 21
four-wire technique 62
free convection 21
free-zone electrophoresis 254-256
freon compounds 159
fully-developed flow, simulations 100-103
fusion bonding, glass 171
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